Filterless Non-Dispersive Infra-Red GAS Detection: A Proof of Concept
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Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/memsys.2017.7863636
https://doi.org/10.1109/memsys.2017.7863636
Abstract
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For the first time, we demonstrate the detection of carbon dioxide $(\mathrm{CO}_{2})$ using a non-dispersive infra-red (NDIR) technique that does not require an expensive CMOS-incompatible optical filter. This is achieved by employing a differential IR thermopile detector with micro-engineered (plasmonic) optical properties, fabricated in a commercially available standard CMOS MEMS process. The proof of concept demonstrated here represents a milestone in low-cost gas sensing spectroscopy, and has the potential to impact profoundly in the entire IR field; many consumer electronics applications (wearables, smartphones, tablets and portable medical devices) will become viable, leading to high volume commercial applications for plasmonic devices.